Cov Khoom Kho Qhov Muag Ntawm Cov Khoom Siv Hluav Taws Xob
Polymer optical cov khoom siv tau dhau los ua qhov tseem ceeb hauv kev ua lag luam niaj hnub no. Raws li kev ua tau zoo rau kev siv kho qhov muag txuas ntxiv sawv, kev tsim cov txheej txheem ua kom paub cov txheej txheem fim ntau cov nyom. Ntawm cov no, kev tsim cov pwm ntxig rau cov txheej txheem replication sawv tawm cov tshwj xeeb tshwj xeeb, ncaj qha cuam tshuam qhov kawg zoo ntawm cov khoom siv kho tshiab. Cov tshuaj xyuas no cov kev tshuaj xyuas no los pab cov cuab yeej siv cov kws tshaj lij ua rau cov kev txiav txim siab hauv kev siv.
Polymer optical cov ntsiab muaj cov ntsiab lus tseem ceeb tshaj cov iav lo ntsiab muag iav. Lawv ua kom cov pawg sai ntau lawm los ntawm kev txhaj tshuaj molding los yog txhaj- compression moulding ntawm cov nqi tsim khoom qis. Ib qho ntxiv, kev sib dhos thiab cov qauv ua ke tuaj yeem ua tau ncaj qha rau hauv cov khoom siv kho qhov muag, tshem tawm cov kev xav tau ntawm cov txheej txheem thiab cov txheej txheem sib dhos ntxiv. Los ntawm cov teeb pom kev zoo rau cov ntawv thov hauv tsheb, los ntawm kev ua kom paub cov cuab yeej rau cov sensors, daim ntawv thov no Cov ntsiab lus ntawm polymer kho qhov muag txuas ntxiv nthuav dav.
Qhov tshwm sim ntawm microstructured optical Cheebtsam tsim nyog saib xyuas. Ntxiv microstructure nta rau lens cov chaw muaj peev xwm txhim kho kev ua tau zoo, txo qhov hnyav, kho cov nqaj hlau. Microstructures xws li microurens arrays, differaction optical cov ntsiab lus, thiab prism generation, thiab kev qhia txog kev sib tw, thiab ntsuas kev ntsuas cov duab, thiab ntsuas kev ntsuas pom
Kev faib tawm cov tshuab tsim khoom lag luam
Kev tsim khoom thev naus laus zis rau cov khoom siv kho tshiab tuaj yeem muab faib ua ob pawg loj: Cov hau kev uas tsim cov chaw nrog kev tsim kho kho qhov muag. Vim tias lub cev muag khoom siv kho qhov muag zoo li yog qhov tseeb yuav tsum tau muaj qhov tseeb ntawm qhov tseeb thiab zoo ob yam ua kev ntsuas cov kev ntsuas rau kev ntsuas ntau thev naus laus zis.
Ultra - precision Machin: lub hauv paus ntawm kev tsim kho kho qhov muag
Txij li thaum nws tshwm sim hauv 1960s, ultra- precision machination tau tseem feem ntau siv txoj kev rau kev tsim cov khoom siv kho qhov muag puab. Cov ntsiab lus zoo ntawm cov thev naus laus zis no nyob hauv kev ua tiav nanometer- qib teeb pom qhov tseeb thiab tau txais qhov tseeb saum npoo zoo thiab cov duab raug. Pob zeb diamond - tshuab sib xyaw ua ke feem ntau pom kev ua kom zoo dua li 10 {}} ua tiav tsis muaj poste {{8} ua.
Yuav kom tau txais siab - cov khoom siv tau zoo, tshuab yuav tsum ua ntawm lawv txwv. Pob zeb diamond machining siv GRANITE li lub hauv paus, nruab nrog high} ceev spindles, thiab meej fixtures thiab khoom siv ua haujlwm. Huab cua cov kabmob spindles thiab hydostatic bearings pab tau meej zog ntawm cov cuab yeej ntawm cov cuab yeej los ntawm iav gratings tuaj yeem lees paub hauv qab 1 nanometer. Kev tswj qhov kub thiab txias yog qhov tseem ceeb, xav tau kev saib xyuas nyob rau hauv ± 0.1k lossis me li ntau.
Ib Leeg - Siv lead ua pob zeb diamond ntawm cov cuab yeej vim nws muaj peev xwm los tsim cov kev sib tw ntse hauv qab 50 nanometers. Qhov ua tau zoo ib qho zoo thiab precision nyob rau ntau ntawm cov khoom siv pob zeb diamond zoo. Txawm li cas los xij, pob zeb diamond machining tau txwv rau tsis pub tsis- ferrous cov ntaub ntawv, ua nickel {} phosphorus txheej txheej kev lag luam txheem. Nickel {{- phosphorus tuaj yeem machined nrog cov cuab yeej pob zeb uas tsis lees txais cov cuab yeej tsis saib xyuas.
Pob zeb diamond tigSawv cev cov txheej txheem txheem rau kev tsim cov qauv kev sib txuas ntawm cov khoom siv kho kho qhov muag, tsim nyog rau kev tsim cov kheej kheej kheej thiab lub ntsej muag zoo nkauj. Ua tau cov khoom muaj nyob ntawm cov txheej txheem ntau yam thiab cov khoom siv khoom siv. Thawj Qhov Cuam Tshuam Muaj xws li ntxaiv nrawm, cov cuab yeej hloov hluav taws xob, thiab tus nqi pub. High ntxaiv nrawm, loj cuab tam cov lus radii, thiab qeeb pub tus nqi feem ntau txhim kho qhov chaw roughness.
Qeeb qeeb servo tshuabtau tsim los ua kom tau raws li qhov xav tau ntawm cov khoom siv tshuab asymmetric. Lub tsev rau ntawm nruab nrab pob zeb diamond teeb tsa teeb, nws ntxiv z- egis oscillation thaum lub tshuab. Qeeb qeeb servo tuaj yeem tsim cov khoom siv asymmetric tsis muaj cov cuab yeej siv ntxiv. Cov thev naus laus zis no tuaj yeem siv los tsim cov microlen arrays, tshaj tawm cov khoom siv kho qhov muag, tawm {eceroces senfaces.
Cov Cuab Yeej Siv Khoom Kub Lub Tuam TxhabZoo li maj mam cuab servo tab sis siv ib qho actuator ntxiv rau oscillate lub cuab yeej taub. Cov cuab yeej ceev servo tso cai rau cov cuab yeej tseeb, tab sis nrog stroke me dua li qeeb cov cuab tam SERVO thev naus laus zis, feem ntau yog ib qho micrometers mus rau ntau pua tus micrometers. Cov cuab yeej nrawm servo yog feem ntau siv rau kev tsim pob zeb diamond-} muab cov qauv muab zoo li cov tsiaj thiab lens arrays.
Pob zeb diamond millingSiv pob zeb diamond pob -}}}}}} mills nrog ib qho kev txiav ntawm kev kub ceev kom tshem tawm cov chips hauv micrometer ntau. Piv rau lub pob zeb diamond tig, milling yog qhov zoo tshaj plaws tab sis muaj kev ywj pheej ntau dua hauv kev tsim. Pob zeb diamond milling yog feem ntau siv rau kev tsim khoom tsis - Cov roj av du thiab cov chaw dawb.
Ya txiavSiv lub cuab yeej tig nrog lub pob zeb diamond tso tawm tawm ntawm {{}} axis, yog li lub pob zeb diamond tsis muaj kev sib cuag nrog cov khoom siv tas mus li. Ya txiav tuaj yeem tsim cov chaw tiaj uas muaj qhov tsis zoo ntawm cov chaw loj thiab tseem yog txoj kev tsim nyog rau kev tsim microstructures thiab cov khoom lag luam zoo.
Tawg hauv ultra - precision machining ntawm hlau
Txij li thaum hardened hlau yog cov nrov tshaj plaws engineering cov ntaub ntawv, muaj kev tshawb fawb ntau tau mob siab rau kev ua tiav machining cov ntaub ntawv ferrous nrog cov cuab yeej pob zeb. Thawj cov cuab yeej hnav cov tshuab muaj xws li adhesion thiab ua -}} cua sov, kev sib txhuam thermal hnav, thiab kev ua yeeb yam kev hnav. Tshuaj kws tshuaj lom neeg sawv cev rau lub ntsiab ua rau ntawm cov cuab yeej hnav.
Txhawm rau kom tsis txhob muaj cuab yeej hnyav, cov kws tshawb nrhiav tau npaj siab rau ntau txoj hauv kev:
COPRORTION TXO TEJyog cov txheej txheem muaj txiaj ntsig tshaj plaws rau machining ferrous cov ntaub ntawv nrog cov cuab yeej pob zeb diamond. Qhov kev txiav cov cuab yeej vibrates elliptically, ua kom txo cov kev sib txhuam thiab lub sijhawm sib cuag ntawm pob zeb diamond thiab substrate. Cov thev naus laus zis no tsis muaj txiaj ntsig tsis yog rau kev siv cov ntaub ntawv ferrod tab sis kuj ua rau cov roj ntsha taw thaum ua tiav Optical nto zoo nrog RA<10 nanometers.
Txhim kho qhov mob txiavsawv cev rau lwm txoj kev rau txo lub pob zeb diamond hnav. Cov Pab Cuam Tshawb Fawb tau sim sib txawv tej kev mob sib txawv suav nrog cryogenic machining thiab machining nyob hauv ib puag ncig cov roj av. Pob zeb diamond tig nyob rau hauv cryogenic tej yam kev mob tuaj yeem txo cov cuab yeej hnav, nrog qhov chaw mos zoo dua 25 nanometers.
Bererless cubic boron nitride cov cuab yeejSawv cev ib qho ntawm cov kev cog lus tshaj plaws rau kev tau txais qhov chaw kho qhov muag ntawm cov khoom siv ferrous. Cubic Boron Nitride muaj kev muaj kub ua hluav taws kub ua haujlwm zoo heev thiab tshuaj lom neeg ruaj khov, nrog hardness thib ob nkaus xwb rau pob zeb diamond. Thaum tig stainless hlau nrog hardness ntawm 52hrc siv binderless cubic tsis yog cubic boron nitride cov cuab yeej, nplaim taws ntawm ra<10 nanometers can be obtained.
Lwm cov thev naus laus zis
Kev Siv Hluav Taws Xob Hlav Txau Machinuleyog cov txheej txheem thermoelectric machines uas tshem cov ntaub ntawv los ntawm cov qauv hluav taws xob ntawm cov cuab yeej hluav taws xob nruab nrab ntawm cov cuab yeej hluav taws xob thiab workpiece. Kev kaw hluav taws xob tshem tawm Machining tuaj yeem tsim cov duab muaj tseeb nrog cov nqi hluav taws xob muaj peev xwm tshem tawm. Txawm li cas los xij, kev ua tiav cov khoom zoo yog tsis txaus rau kev siv kho qhov muag, txiav, lossis polishing kom tau txais cov chaw du thiab muaj tseeb. Micro -}}}}} piv rau cov kev siv high} Micrometers thiab nam piv txog 100.
Electrochemical MachiningTshem tawm cov khoom siv los ntawm Anodic kev tshaj tawm ntawm cov hlau thaum lub sijhawm electrolysis. Piv rau cov tshuab tshuab tshuab tshuab, electrochemical machining muaj cov khoom siv tshem tawm cov khoom siv tawv, tsis muaj cuab yeej hnav, thiab du nto. Cov tshuab no tuaj yeem siv rau Post- kev ua haujlwm machined workpieces, thaum nws tau hu ua electrochemical polishing. Siv txhim kho electrochemical machining txheej txheem, nplaim roughness tuaj yeem ncav cuag 0.06 micrometers.
Kev sib tsoofeem ntau siv rau kev tsim kho cov pwm. Txij li thaum roughnness ua tiav thaum sib tsoo yog tsis txaus rau cov ntawv thov optical, post- kev ua haujlwm xws li polishing} yuav tsum tau ua. Ultra - Precision sib tsoo tuaj yeem siv cov chaw tsim hluav taws xob tuaj yeem siv cov qauv siv cub ua kom tiav kom ua tiav qhov tseeb yog qhov tseeb thiab qhov tseeb ntawm Ra<10 nanometers. An important factor is ensuring stable condition of the grinding wheel, with electrolytic in-process dressing being a suitable method.
Microstructure kev lag luam
Cov txheej txheem Liga: Pioneer ntawm high - precument microstructures
Liga sawv rau peb lo lus German: Lithography, Electroplating, thiab moulding. Cov thev naus laus zis no tau tsim kho thaum xyoo 1980 thiab tau siv dav siv rau kev tsim khoom tsim kev txhaj tshuaj pleev cov cuab yeej. Rau qhov chaw nrog siab -}} ratio qauv, kev tsim cov khoom lag luam tsim tawm rau lwm cov chaw tsim khoom siv, kev tsim cov microstruction dua li 1 micrometer.
Lub Liga cov txheej txheem piav qhia txog txheej txheem ntawm peb ua haujlwm ua tiav. Thawj kauj ruam yog ib txoj kev ua ib qho kev cai rau cov txheej txheem ntawm substrate. Tom qab, ib txheej txheem nickel electroplating siv, siv cov qauv txheej txheem raws li tus tswv los tsim cov pwm. Kauj ruam kawg tuaj yeem siv txhaj tshuaj molding los yog kub embossing los tsim chaw. Cov thawj daim ntawv thov ntawm cov txheej txheem Liga hauv Optics yog tsim cov micretactive optical cov ntsiab lus, cov peev xwm tuaj yeem tsim cov microuract arrays, microrisms, micromirrors, thiab WaveGuides.
Nanoimprint lasraphy: kos duab ntawm nanoscale precision
Nanoimprint lathography yog ib qho cuab yeej thev naus laus zis uas tso cai siab- kev tawm tsam ntawm polymer nanostructures. Cov thev naus laus zis tau npaj thawj zaug xyoo 1995 thiab muaj peb qib tseem ceeb: ua ntej, tus qauv qauv yog coj los ua pwm, thiab thaum kawg qhov txheej txheem imprinting tshwm sim.
Nanoimprint lathography muaj ob qhov sib txawv: thermal impinting siv cua sov los ntsuas kub kom txias dua lub khob hloov cua txias, ua raws li los ntawm txias rau chav txias; UV Iccinting Siv Ultraviolet Lub Teeb Kho Kom Raug Cov Tawm Tawm Tsam Tawm, uas xav tau pob tshab pwm. Siv Naniatomprint lithography thev naus laus zis, nanostructures nrog qhov ntau thiab tsawg qhov ntau thiab tsawg dua hauv qab 10 nanometers tuaj yeem tsim thiab rov ua dua. Nws yog feem ntau siv nyob rau hauv daim ntawv thov be mail nrog rau hologram, anti {} {{{{{5} -} {5} {roll applicions.
Laser ncaj qha: hloov microstructure
Piv rau laser machining, laser ncaj sau ntawv yuav siv laser nqaj rau cov txheej txheem licoresist, zoo ib yam li cov txheej txheem lithigy siv hauv cov qauv kev tsim khoom. Ib txheej txheej ntawm photoresist yog tso rau ntawm substrate, ces tus photoresist yog qauv siv cov txheej txheem sau ncaj nraim. Laser ncaj nraim sau cia ua kev tsim cov qauv binary thiab yog feem ntau siv rau kev tsim cov fresnel lossis cov qauv sib txawv, tshwj xeeb ntawm cov phiaj xwm.
Piv rau lithograph txoj kev, laser ncaj sau kom tsis txhob muaj sub - Micrometer polrometer Alignment yuav tsum muaj ntawm cov kauj ruam sib kis tau zoo. Txhawm rau repicate cov qauv, pwm ntxig yuav tsum yog tsim, uas tuaj yeem siv Nickel Electroplating. Tus qauv tsim tawm hauv tus photoresist sawv cev tus tswv, ua raws li los ntawm kev casting. Tsis ntev los laser ncaj ncaj cov kev tsim qauv muaj ua qauv ntawm nkhaus substrates ua tau, kov yeej lub ntiaj teb substrate txwv kev txwv. Tus qauv ntau thiab tsawg yog nyob ib ncig ntawm 5 micrometers tab sis kuj tuaj yeem txo rau 1-3 micrometers.
Hauv cov npoo av sau thiab ion nqaj lithography
Hluav Taws Xob Ci Show Sauyog ib txoj kev xaiv rau cov qauv siv, zoo ib yam li laser ncaj qha sau cov tshuab thev naus laus zis, siv rau kev tsim qauv qauv ua raws los ntawm Nickel Electroplating cov txheej txheem. Cov thev naus laus zis tau tsim tawm semiconductor daim npog ntsej muag me me tab sis kuj haum rau kev tsim kho cov fresnel thiab cov qauv sib txawv.
Hluav taws xob nqaj kev sau ntawv yog siv nyob rau hauv cov txheej txheem semiconduct, yog li muaj kev siv zog tau nqis peev hauv kev nce qib kev daws teeb meem. Hluav taws xob nqaj ib qho kev daws teeb meem hauv PMMA - Raws li cov photoresist tuaj yeem muaj tsawg li 10 nanometers. Cov thev naus laus zis no kuj tseem tuaj yeem siv tau ua cov txheej txheem polishing rau cov kab hlau, siv cov chaw pov tshuaj hauv hluav taws xob rau scan chaw, nrog hlau saum npoo ci ua kom txo qis saum npoo av.
Ion tw lamraphyKev siv tsom rau ion Beacs los soj ntsuam cov chaw scan, yog li tsim cov qauv me me. Cov thev naus laus zis zoo heev rau hluav taws xob nqaj sau, tab sis Eons muaj ntau dua thiab nqa tus nqi ntau dua li hluav taws xob me me, ua rau muaj hluav taws xob ntxiv. Siv rau ion kab teeb, qauv ntau thiab tsawg dua 5 nanometers tau tshaj tawm. Cov thev naus laus zis no tseem siv los ua polishonic optical lub ntsiab, siv tsawg ions {4 4}} Lub zog ation kom tshem tawm cov yuam kev thiab txo cov ntxhib, ua tiav nplaim roughness ntawm ra<1 nanometer.
Laser machining thiab polishing
Siv cov mem tes luv luv 0}} pulse -}}}}} pa mem duab yog cov ntawv thov sib txawv ntawm cov qauv micromacinining thiab tuaj yeem siv rau cov qauv pwm. Thawj qhov txiaj ntsig ntawm laser machining yog tias yuav luag txhua cov ntaub ntawv tuaj yeem ua tiav. Thaum txhua qhov tsis zoo tau zoo dua, laser machining siv tau txawm siv tau ua kev kho polrishing, nrog nto zoo ncav tau RA<1 micrometer. Laser machining can produce structures as small as 10 micrometers.
Polishing thiab lappingUa tiav kev kho cov lus uas tsim cov chaw du uas siv cov npoo tsis muaj kev txiav. Txhua yam txheej txheem muaj nyob rau hauv ib qho yog kev siv abrasives mus du thaj chaw, nrog abrasive tshem tawm hauv dej los ua cov slurry. Polishing piffe tuaj yeem tsim cov khoom zoo siab heev hauv nano thiab sub- nano rates, tab sis cov nqi tshem tawm feem ntau tsawg. Polishing tuaj yeem siv los ua cov phiajcim, kheej kheej, asperical, thiab cov chaw ua haujlwm ua haujlwm nrog rau cov chaw muaj txheej txheem.
Tshuab Xaiv
Txhawm rau pab txhawb kev txiav txim siab rau kev xaiv txoj kev tsim nyog, peb tuaj yeem paub qhov txawv ntawm peb pawg: tsim, micros {{0} {0} {{kev ua.
Txog kev sib txuam cov txheej txheem, sib tsoo thiab ultra - precision machining tuaj yeem ua kom muaj ntau qhov kev tshem tawm cov nqi hluav taws xob piv rau cov tshuab hluav taws xob thiab hluav taws xob tshem tawm Machining. Ultra - precision machining yog ib txoj kev siv thev naus laus zis tseem ceeb tshaj plaws, tshwj xeeb thaum tsim kho cov khoom muag ntawm cov khoom muag. Thaum muaj cov kev xav tau yooj yim, tsis muaj lwm yam thev naus laus zis muaj cov kev ywj pheej zoo li ultra {{1} pref precision machining.
Rau microstructure thev naus laus zis, cov teeb tsa loj yog qhov tseem ceeb tshaj plaws. Raws li txoj cai ntawm tus ntiv tes xoo, raws li tus qauv loj tsawg thiab cov qauv muaj txiaj ntsig, thaj chaw uas tuaj yeem tsim kev txo qis vim kev siv sijhawm ntev dua. Ultra - pref precision machiness tsis tsuas yog txoj kev haum rau kev sau pwm ntxig tab sis kuj tseem siv tau los tsim microstructures. Tshwj xeeb, ya tej txheej txheem txiav yuav sai thiab kev lag luam tsim cov chaw loj hauv ib cheeb tsam hauv ib cheeb tsam hauv ib cheeb tsam loj.
Rau txhua hom machining txoj kev uas zoo tsis txaus yog tsis txaus rau cov ntawv thov optical, post {{} Kev ua tau tuaj yeem tom qab txhim kho cov khoom zoo. Tshwj xeeb, polishing thiab lapping tuaj yeem ua cov chaw kho qhov muag. Txawm li cas los xij, nws yuav tsum tau txiav txim siab tias cov lus tshaj tawm - Kev ua haujlwm ua haujlwm yuav cuam tshuam txhua qhov zoo ntawm cov duab thiab cov qauv raug.